Rapid development of Micro-Electro-Mechanical-Systems during the last two decades has allowed the quantitative measurement of interactions between biological objects and their immediate environments at the small scales. The measurement is accomplished by converting physical signals from one energy domain to another, using microfabricated devices called microtransducers (i.e., microsensors and microactuators). In this course, we will introduce state-of-the-arts microtansducers used in biomedical research laboratories, clinical practice and industrial products. The working principles and fabrication processes of these microtransducers will be elaborated. The engineering design concept will be incorporated in the application-driven model to present the unique research approaches for this interdisciplinary field.

Please contact Melanie Senitko (senitko.1@osu.edu) for the course register.

Microfabrication technologies have become increasingly important as they enable the development of various micro-electro-mechanical-systems (MEMS), widely used in academic research and industry. This course will systematically introduce microfabrication technologies and the related challenges. The course contains a detailed overview of microfabrication technologies, including silicon microfabrication, polymer microfabrication, and advanced microfabrication topics. The students will be exposed to practical microfabrication techniques through in-class demonstration. Microfabrication process will be presented to the students by several case studies, including representative microdevices in different fields from different materials.

Please contact Melanie Senitko (senitko.1@osu.edu) for the course register.